Drag and drop the drawing and do all necessary settings.


- put the coordinates of your first pattern (example: U=1mm V=1mm)

- put the Layer number that you want to expose

- double click on the line in the positionlist: you see this Layer of the drawing, close the drawing window

- right click on the line, choose properties, a window pops up (Exposure Properties)

-> put the Working area to the maximum extent possible of the choosen writefield (example: writefield = 1000µm, put -500 to 500 for U and V)

->klick on Exposure Parameter

-disable lines and dots. (Uncheck default and choose disable)

-> Click on "Calculator" button

"Exposure Parameter Calculation" window opens

-Put Area Dose = 200µAs/cm² -Choose Area Step Size to be reasonable. Example: 1µm wide line, Area step size < 0.05µm. -Click on the calculator symbol to calculate Area Dwell Time. ->! resulting Beam Speed must be below 8mm/s ->! check that you have no red warning message (appears if Area Dwell Time < 0.0000400

If you have one of these problems: Increase Area Step Size If that is not possible: use smaller aperture and measure beam current again.

-Click Ok Back in "Exposure Properties"

-Click "Times" -> The machine makes a virtual exposure and tells you how long it takes. Check that the time it is reasonable.