• O.V. Lounasmaa Laboratory
  • About
  • Contact information
  • Events
  • Picture archive
• LT Research
  • Rota group
  • µKI group
  • Helium theory group
• Nanophysics
  • Nano group
  • Pico group
  • Kvantti group
  • NEMS group
  • Nano theory group
• Brain Research Unit
  • Human systems neuroscience
  • Imaging Language
  • Vision systems neuroscience
• Publications
• Courses
• Services
  • Facilities
  • Infrastructure
• Internal
  • Help on LTLwiki
  • Register to LTL
  • Computing
    • LT webmail
    • BRU webmail
  • Internal BRU pages
    • Human systems neuroscience
    • Imaging Language
    • Vision systems neuroscience
  • Helium group pages
  • Nanophysics
  • Recent LTLwiki changes

Director: Pertti Hakonen
Secretary:

Fax: +358 9 470 22969

Mail address:
PO BOX 15100
00076 AALTO
FINLAND

Visiting address:
Puumiehenkuja 2B
Otaniemi, Espoo

How to find us

Vastuualue: T31100
VAT number: FI22283574

Clean Room:SEM

Contents 1 General Information 2 Tutorials 3 Sample patterns 4 Booking

General Information

• Contact Person: Antti Laitinen, Alpo Välimaa
• Location: cleanroom
• Status: working
• Paper Manuals: cleanroom

Tutorials

• User guide for JEOL 7100+ SEM (txt)

Sample patterns

• Run file (rf6) and Design CAD file (dc2) for marker array pattern. Read the above User guide for automatic focusing during the patterning.
• Run file (rf6) and Design CAD file (dc2) for example on how to use the NPGS Fracture-mode in writing bigger areas. By Matthias Brandt.

Booking

• The SEM can be booked through a Cryohall booking system